{"id":5741,"date":"2023-08-17T12:34:26","date_gmt":"2023-08-17T12:34:26","guid":{"rendered":"http:\/\/www.scil-nano.com\/Clone\/?page_id=5741"},"modified":"2024-03-06T09:23:22","modified_gmt":"2024-03-06T08:23:22","slug":"imprint-tools","status":"publish","type":"page","link":"https:\/\/www.scil-nano.com\/Clone\/imprint-tools\/","title":{"rendered":"Imprint Tools"},"content":{"rendered":"\n
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Equipment according to your needs<\/h1>\n<\/div><\/div>\n\n\n\n
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FabSCIL: <\/strong>
From manual R&D to fully automatic<\/strong><\/p>\n\n\n\n

FabSCIL family allows printing of 150 to 300 mm wafers with automatic loading and positioning of the stamp.<\/p>\n\n\n\n

FabSCIL<\/strong> is designed to be connected to a cluster system that operates wafer handling, spin-coating, baking, cooling, and other processes.<\/p>\n\n\n\n

Doing up to 80 wafers per hour with an overlay accuracy of sub-1\u00b5m, our FabSCIL cluster<\/strong> is suitable for high-volume production manufacturers. The modular platform can be customized with additional tools: multiple FabSCIL modules, spin coaters, etc. to fit your requirements.<\/p>\n\n\n\n

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20-80
wafers\/h<\/strong><\/p>\n<\/div>\n\n\n\n

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\"alignment<\/figure><\/div>\n\n\n
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< 1\u03bcm<\/strong> <\/strong>
alignment accuracy<\/strong><\/p>\n<\/div>\n\n\n\n

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\"wafer<\/figure><\/div>\n\n\n
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150 – 300 mm
wafer size<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

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TECHNICAL DATA<\/a><\/div>\n<\/div>\n\n\n\n
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\"FabSCIL
FabSCIL<\/strong><\/figcaption><\/figure><\/div>\n\n\n
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\"FabSCIL
FabSCIL cluster<\/strong><\/figcaption><\/figure><\/div><\/div>\n<\/div><\/div>\n<\/div>\n<\/div><\/div>\n\n\n\n
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AutoSCIL: Integrated Tool<\/strong><\/p>\n\n\n\n

AutoSCIL<\/strong> makes easy to perform nanoimprint production with real-time process monitoring.<\/p>\n\n\n\n

With all the necessary processes to obtain the nanopatterns included: wafer handling, aligning, spin-coating, SCIL imprinting and baking and cooling. The compact tool you are looking for.<\/p>\n\n\n\n

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\"wafers\/h\"<\/figure><\/div>\n\n\n
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30-60
wafers\/h<\/strong><\/p>\n<\/div>\n\n\n\n

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\"alignment<\/figure><\/div>\n\n\n
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< 1\u03bcm
alignment accuracy<\/strong><\/p>\n<\/div>\n\n\n\n

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\"wafer<\/figure><\/div>\n\n\n
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100 – 200 mm
wafer size<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

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TECHNICAL DATA<\/a><\/div>\n<\/div>\n\n\n\n
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\"AutoSCIL<\/figure><\/div><\/div>\n<\/div><\/div>\n<\/div>\n<\/div><\/div>\n\n\n\n
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LabSCIL: Specially developed for R&D<\/strong><\/p>\n\n\n\n

LabSCIL<\/strong> is perfect for new product development.<\/p>\n\n\n\n

Ideal for universities, research centers, or laboratories, the LabSCIL uses the same automatic imprint technology as the high-volume SCIL tools but with the manual loading of wafers.<\/p>\n\n\n\n

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\"wafer\/h\"<\/figure><\/div>\n\n\n
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Semi-automatic<\/strong><\/p>\n<\/div>\n\n\n\n

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\"alignment<\/figure><\/div>\n\n\n
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< 1 \u03bcm
alignment accuracy<\/strong><\/p>\n<\/div>\n\n\n\n

\n
\"wafer<\/figure><\/div>\n\n\n
<\/div>\n\n\n\n

100 – 200 mm
wafer size<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

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TECHNICAL DATA<\/a><\/div>\n<\/div>\n\n\n\n
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\"LabSCIL<\/figure><\/div><\/div>\n<\/div><\/div>\n<\/div>\n<\/div><\/div>\n\n\n\n
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Feel free to get in touch with us<\/h1>\n\n\n\n
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CONTACT US<\/span><\/a><\/div>\n<\/div>\n\n\n\n
<\/div>\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":5,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_eb_attr":"","neve_meta_sidebar":"","neve_meta_container":"","neve_meta_enable_content_width":"","neve_meta_content_width":0,"neve_meta_title_alignment":"","neve_meta_author_avatar":"","neve_post_elements_order":"","neve_meta_disable_header":"","neve_meta_disable_footer":"","neve_meta_disable_title":"","_themeisle_gutenberg_block_has_review":false,"footnotes":""},"class_list":["post-5741","page","type-page","status-publish","hentry"],"yoast_head":"\nImprint Tools – SCIL Nanoimprint Solutions<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.scil-nano.com\/Clone\/imprint-tools\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" 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